Публикации сотрудников ОП "Отдел микротехнологий" - Ярославль ОФТИ им. К.А. Валиева Центра перспективной микроэлектроники за 2026 год
- Uvarov I.V., Naumov V.V., Muravyeva T.I., Shcherbakova O.O., Svetovoy V.B. Investigation of contact area in a MEMS switch performed with AFM // Sensors and Actuators A: Physical. – 2026. – Vol. 397. – 117295. DOI: 10.1016/j.sna.2025.117295, Белый список
This work was supported by the Russian Science Foundation. Fabrication process and testing of the switch were supported by Grant No. 25-19-20107 and AFM inspection and theoretical analysis were supported by Grant No. 24-29-00106.