Publications of VALIEV IPT RAS, YB members for 2022 year
Smirnova M.A., Bachurin V.I., Lebedev M.E., Mazaletsky L.A., Pukhov D.E., Churilov A.B., Rudy A.S. Study of the topography of silicon surface evolution under irradiation by a gallium ion beam. Vacuum, Volume 203, 2022, 111238, DOI: 10.1016/j.vacuum.2022.111238
Belov Y.D., Zimin S.P., Amirov I.I., Naumov V.V. Influence of ion-plasma treatment on the surface morphology of epitaxial lead-tin telluride films. Journal of Physics: Conference Series. 2270 (2022) 012040., DOI:10.1088/1742-6596/2270/1/012040
Uvarov I.V., Melenev A.E., Svetovoy V.B. Fast electrochemical actuator with Ti electrodes in the current stabilization regime. Micromachines, 2022, Vol. 13, 283.
Uvarov I.V., Izyumov M.O. Reliability issues for electrostatically actuated MEMS switch. Proceedings of SPIE, 2022, Vol. 12157 (International Conference on Micro- and Nano-Electronics 2021), 121570I. DOI: 10.1117/12.2623060
Uvarov I.V., Melenev A.E., Svetovoy V.B. A fast membrane actuator in the current stabilization regime. Proceedings of SPIE, 2022, Vol. 12157 (International Conference on Micro- and Nano-Electronics 2021), 121570J. DOI: 10.1117/12.2623816
Shlepakov P.S., Uvarov I.V. FEM simulation of AlN-based MEMS energy harvester. Proceedings of SPIE, 2022, Vol. 12157 (International Conference on Micro- and Nano-Electronics 2021), 121570N. DOI: 10.1117/12.2624607
Zimin S.P., Kolesnikov N.N., Amirov I.I., Naumov V.V., Gorlachev E.S., Kim S., Kim N.-H. Variation of Surface Nanostructures on (100) PbS Single Crystals during Argon Plasma Treatment. Crystals 2022, 12(1), 111.